Methods of Deposition of Hydrogenated Amorphous Silicon for Device Applications
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Methods of Deposition of Hydrogenated Amorphous Silicon for Device Applications
van Sark, W.G.J.H.M.; Francombe, M.H.
(2002) Advances in Plasma-Grown Hydrogenated Films, pp. 1 - 215
(Part of book)
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Keywords: Taverne
DOI:
https://doi.org/10.1016/B978-012512908-4/50004-7
Publisher: Academic Press Inc.
(Non peer reviewed)
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