Methods of Deposition of Hydrogenated Amorphous Silicon for Device Applications

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Methods of Deposition of Hydrogenated Amorphous Silicon for Device Applications
 
van Sark, W.G.J.H.M.
(2002) Francombe, M.H. (ed.), Advances in Plasma-Grown Hydrogenated Films, pp. 1 - 215
(Part of book)
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Open Access version via Utrecht University Repository Publisher version
 
Keywords: Taverne
DOI: https://doi.org/10.1016/B978-012512908-4/50004-7
Publisher: Academic Press Inc.
(Non peer reviewed)
 
 
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