Abstract
If tantalum filaments are used for the hot wire chemical vapour deposition (HWCVD) of thin film silicon, various types of tantalum silicides are formed, depending on the filament temperature. Under deposition conditions employed for device quality amorphous and microcrystalline silicon (Twire ≈ 1750 °C) a Ta5Si3 (as determined by XRD)
... read more