HF Species and Dissolved Oxygen on the Epitaxial Lift-Off Process of GaAs Using AlAsP Release Layers

van Niftrik, A.T.J.; Schermer, J.J.; Bauhuis, G.J.; Mulder, P.; Larsen, P.K.; van Setten, M.J.; Attema, J.J.; Tan, N.C.G.; Kelly, J.J.