Anisotropy in the wet-etching of semiconductors

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Anisotropy in the wet-etching of semiconductors
 
Kelly, J.J.; Philipsen, H.G.G.
(2006) Current opinion in solid state & materials science, volume 9, pp. 84 - 90
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ISSN: 1359-0286
Publisher: Elsevier Limited
(Peer reviewed)
 
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