Abstract
Thin film hydrogenated nanocrystalline silicon (nc-Si:H) solar cells were deposited at a high growth rate of 5 nm/s by Very High Frequency Plasma Enhanced Chemical Vapor Deposition (VHF PECVD). A single deposition yielded 30 working cells out of 30 test cells. After characterization of J-V characteristics under AM1.5 conditions, spectral
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