Above-CMOS a-Si and CIGS solar cells for powering autonomous microsystems

Lu, J.; Liu, W.; van der Werf, C.H.M.; Kovalgin, A.Y.; Sun, Y.; Schropp, R.E.I.; Schmitz, J.

doi:https://doi.org/10.1109/IEDM.2010.5703457

Above-CMOS a-Si and CIGS solar cells for powering autonomous microsystems

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Above-CMOS a-Si and CIGS solar cells for powering autonomous microsystems

Lu, J.; Liu, W.; van der Werf, C.H.M.; Kovalgin, A.Y.; Sun, Y.; Schropp, R.E.I.; Schmitz, J.

(2010) Electron Devices Meeting (IEDM), 2010 IEEE International, pp. 31.3.1 - 31.3.4

(Part of book)

Abstract

Two types of solar cells are successfully grown on chips from two CMOS generations. The efficiency of amorphous-silicon (a-Si) solar cells reaches 5.2%, copperindium- gallium-selenide (CIGS) cells 7.1%. CMOS functionality is unaffected. The main integration issues: adhesion, surface topography, metal ion contamination, process temperature, and mechanical stress can be resolved ... read more

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DOI: https://doi.org/10.1109/IEDM.2010.5703457

Publisher: IEEE

Note: International Electron Device Meeting

(Peer reviewed)

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