Sputtering of polycrystalline metals by inert gas ions of low energy (100–1000 eV)

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Sputtering of polycrystalline metals by inert gas ions of low energy (100–1000 eV)
 
Weijsenfeld, C.H.; Hoogendoorn, A.; Koedam, M.
(1961) Physica, volume 27, issue 8, pp. 763 - 764
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ISSN: 0031-8914
Publisher: Elsevier
 
 
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