Anisotropic etching of three-dimensional shapes in silicon

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Anisotropic etching of three-dimensional shapes in silicon
 
Kretschmer, H. -R.; Xia, X.; Kelly, J.J.; Steckenborn, A.
(2004) Journal of the Electrochemical Society, volume 151, issue 10, pp. C633 - C636
(Article)
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DOI: https://doi.org/10.1149/1.1790512
ISSN: 0013-4651
Publisher: Electrochemical Society, Inc.
(Peer reviewed)
 
 
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