Electronic sputtering of silicon suboxide films by swift heavy ions

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Electronic sputtering of silicon suboxide films by swift heavy ions
 
Arnoldbik, W.M.; Zeijlmans van Emmichoven, P.A.; Habraken, F.H.P.M.
(2005) Physical Review Letters, volume 94, pp. 1 - 4
(Article)
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ISSN: 0031-9007
Publisher: American Physical Society
(Peer reviewed)
 
 
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