Protocrystalline Silicon at High Rate from Undiluted Silane

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Protocrystalline Silicon at High Rate from Undiluted Silane
 
Schropp, R.E.I.; van Veen, M.K.; van der Werf, C.H.M.; Williamson, D.L.; Mahan, A.H.
(2004) Materials Research Society symposia proceedings, volume 808, issue 204, pp.
(Article)
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ISSN: 0272-9172
Publisher: Materials Research Society
(Peer reviewed)
 
 
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