Abstract
Nanocrystalline (or microcrystalline) silicon (nc-Si:H or μc-Si:H) is an absorber material that is crucial for obtaining thin film silicon tandem solar cells with high efficiency. This material is conventionally produced by direct plasma-enhanced chemical vapor deposition (PECVD), which is based on the dissociation of silane (SiH4) and hydrogen (H2) in
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