HF Species and Dissolved Oxygen on the Epitaxial Lift-Off Process of GaAs Using AlAsP Release Layers
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HF Species and Dissolved Oxygen on the Epitaxial Lift-Off Process of GaAs Using AlAsP Release Layers
van Niftrik, A.T.J.; Schermer, J.J.; Bauhuis, G.J.; Mulder, P.; Larsen, P.K.; van Setten, M.J.; Attema, J.J.; Tan, N.C.G.; Kelly, J.J.
(2007) Journal of the Electrochemical Society, volume 155, pp. D35 - D39
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ISSN: 0013-4651
Publisher: Electrochemical Society, Inc.
(Peer reviewed)
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